Title :
Operating modes of an atmospheric pressure radio frequency plasma
Author :
Yang, Xiawan ; Moravej, Maryam ; Nowling, Gregory R. ; Chang, Jane P. ; Hicks, Robert F.
Author_Institution :
Dept. of Chem. Eng., Univ. of California, Los Angeles, CA, USA
fDate :
4/1/2005 12:00:00 AM
Abstract :
The physics of an atmospheric pressure, radio frequency plasma has been investigated. The discharge is generated with helium and 0.4 vol.% nitrogen passing between two metal electrodes with a 3.0-mm gap. It was discovered that at a critical power density of 2.1 kW/cm3, the plasma undergoes sheath breakdown and transitions from the α- to the γ-mode. Photographs are presented showing the unique distribution of excited-state species under these conditions.
Keywords :
helium; high-frequency discharges; nitrogen; plasma instability; plasma sheaths; plasma sources; 3.0 mm; He-N; atmospheric pressure radiofrequency plasma; critical power density; excited-state species; helium; metal electrodes; nitrogen; photographs; plasma modes; plasma sheath breakdown; Atmospheric-pressure plasmas; Electrodes; Helium; Nitrogen; Plasma density; Plasma materials processing; Plasma sheaths; Plasma sources; Radio frequency; Voltage; Atmospheric pressure plasma; radio frequency;
Journal_Title :
Plasma Science, IEEE Transactions on
DOI :
10.1109/TPS.2005.845057
