Title :
Effect of multipolar magnetic field on the electron density in a plasma reactor
Author :
Takekida, Hideto ; Nanbu, Kenichi
Author_Institution :
Inst. of Fluid Sci., Tohoku Univ., Sendai, Japan
fDate :
4/1/2005 12:00:00 AM
Abstract :
The effect of the multipolar magnetic field on the plasma density is visualized using the particle-in-cell/Monte Carlo method. The region of high-plasma density for various magnetic fields is localized near the wall of a reactor.
Keywords :
Monte Carlo methods; discharges (electric); plasma confinement; plasma density; plasma simulation; Monte Carlo method; electron density; high-plasma density; multipolar magnetic field; particle-in-cell method; plasma reactor; visualization; Argon; Electron emission; Inductors; Magnetic confinement; Magnetic fields; Plasma confinement; Plasma density; Plasma materials processing; Plasma simulation; Plasma temperature; Multipolar magnetic field; particle modeling; particle-in-cell/Monte Carlo (PIC/MC) simulation; processing plasma;
Journal_Title :
Plasma Science, IEEE Transactions on
DOI :
10.1109/TPS.2005.845004
