Spatial electron density distribution in a high-power pulsed magnetron discharge

Author

Bohlmark, J. ; Gudmundsson, J.T. ; Alami, J. ; Latteman, M. ; Helmersson, U.

Author_Institution

Dept. of Phys. & Meas. Technol., Linkoping Univ., Sweden

Volume

33

Issue

2

fYear

2005

fDate

4/1/2005 12:00:00 AM

Firstpage

346

Lastpage

347

Abstract

The spatial electron density distribution was measured as function of time in a high-power pulsed magnetron discharge. A Langmuir probe was positioned in various positions below the target and the electron density was mapped out. We recorded peak electron densities exceeding 10/sup 19/ m/sup -3/ in a close vicinity of the target. The dynamics of the discharge showed a dense plasma expanding from the "race-track" axially into the vacuum chamber. We also record electrons trapped in a magnetic bottle where the magnetron magnetic field is zero, formed due to the unbalanced magnetron.

Keywords

Langmuir probes; afterglows; high-frequency discharges; ionisation; magnetic traps; plasma density; sputter deposition; Langmuir probe; discharge dynamics; electron trapping; high-power pulsed magnetron discharge; magnetic bottle; magnetron magnetic field; plasma expansion; spatial electron density distribution; vacuum chamber; Magnetron sputtering; plasma density; pulsed plasmas; thin film deposition;

fLanguage

English

Journal_Title

Plasma Science, IEEE Transactions on

Publisher

ieee

ISSN

0093-3813

Type

jour

DOI

10.1109/TPS.2005.845022

Filename

1420469