Title :
Double sheaths in RF discharges
Author :
Marques, Luís ; Gousset, Gérard ; Alves, Luís L.
Author_Institution :
Centro de Fisica de Plasmas, Inst. Superior Tecnico, Lisbon, Portugal
fDate :
4/1/2005 12:00:00 AM
Abstract :
This paper analyzes the formation of double space-charge sheaths, associated with the development of double ionization structures in radio frequency discharges. A simulation tool is used to generate space-time images of the ionization rate in hydrogen and in helium, obtained by inducing artificial modifications in the mobility of charged particles, with these gases.
Keywords :
helium; high-frequency discharges; hydrogen; ionisation; plasma sheaths; plasma simulation; space charge; H; He; charged particle mobility; double ionization structures; double space-charge sheaths; helium; hydrogen; radio frequency discharges; simulation; space-time images; Electrodes; Electron mobility; Gases; Helium; Hydrogen; Image generation; Ionization; Plasma confinement; Plasma sheaths; Radio frequency; Discharge modeling; field inversion; helium; hydrogen; plasma sheaths; radio frequency (RF) discharges;
Journal_Title :
Plasma Science, IEEE Transactions on
DOI :
10.1109/TPS.2005.845130
