Title :
Three-dimensional remarkable images of low-pressure H2 ICP in E-mode
Author :
Miyoshi, Y. ; Miyauchi, M. ; Oguni, A. ; Makabe, T.
Author_Institution :
Dept. of Electron. & Electr. Eng., Keio Univ., Yokohama, Japan
fDate :
4/1/2005 12:00:00 AM
Abstract :
Computerized tomography (CT), in association with optical emission spectroscopy (OES), is used to investigate the three-dimensional image of radio frequency inductively coupled plasma (RF-ICP) in low-pressure hydrogen in E-mode. As a series of CT studies in this paper, we demonstrate a distinct image in H2 ICP in the E-mode, i.e., the presence of two independent plasmas in a low-pressure region.
Keywords :
hydrogen; plasma diagnostics; plasma instability; E-mode; H2; computerized tomography; low-pressure H2 ICP; optical emission spectroscopy; radio frequency inductively coupled plasma; three-dimensional images; Coils; Computed tomography; Electrons; Hydrogen; Inductors; Plasma applications; Plasma sources; Radio frequency; Spectroscopy; Stimulated emission; Computerized tomography; E-mode; hydrogen; inductively coupled plasma; optical emission spectroscopy;
Journal_Title :
Plasma Science, IEEE Transactions on
DOI :
10.1109/TPS.2005.845338
