Title :
Wave currents in a helicon plasma source-model results
Author :
Bose, Deepak ; Govindan, T.R.
Author_Institution :
NASA Ames Res. Center, ELORET Corp., Moffett Field, CA, USA
fDate :
4/1/2005 12:00:00 AM
Abstract :
The propagation of wave components of plasma current in a helicon source is shown. The simulation results are obtained by self-consistently solving the wave equations with the discharge balance equations in a two-dimensional axisymmetric plasma reactor. The space charge wave is also included to model the Trivelpiece-Gould wave mode.
Keywords :
Maxwell equations; Poisson equation; antennas in plasma; helicons; high-frequency discharges; plasma density; plasma simulation; plasma sources; plasma transport processes; plasma waves; space charge; wave equations; Trivelpiece-Gould wave mode; discharge balance equations; helicon plasma source; plasma current; simulation; space charge wave; two-dimensional axisymmetric plasma reactor; wave currents; wave equations; wave propagation; Antennas and propagation; Inductors; Plasma applications; Plasma density; Plasma devices; Plasma simulation; Plasma sources; Plasma waves; Poisson equations; Radio frequency; Helicon plasma; plasma sources; radio frequency (RF) plasma;
Journal_Title :
Plasma Science, IEEE Transactions on
DOI :
10.1109/TPS.2005.845306
