Title :
Coplanar ac discharges between cylindrical electrodes with a nanoporous alumina dielectric: Modular dielectric barrier plasma devices
Author :
Cho, J.H. ; Lee, K.-W. ; Park, S.-J. ; Eden, J.G.
Author_Institution :
Dept. of Chem., Myongji Univ., Yong-In, South Korea
fDate :
4/1/2005 12:00:00 AM
Abstract :
Dielectric barrier discharges between coplanar Al rods having an ∼2-μm-thick layer of nanoporous alumina dielectric at the surface have been investigated. Rods 3 mm in diameter, 7 cm in length, and spaced by 5 mm produce stable and intense glow discharges in 50 torr of Ne when pairs of rods are driven by an alternating current (bipolar) waveform for which the peak voltage is ∼460-510 V.
Keywords :
alumina; dielectric materials; electrodes; glow discharges; nanoporous materials; plasma devices; plasma instability; plasma transport processes; 3 mm; 5 mm; 50 torr; 7 cm; Al; Al2O3; alternating current bipolar waveform; coplanar AC discharges; coplanar Al rods; cylindrical electrodes; dielectric barrier discharges; glow discharges; modular dielectric barrier plasma devices; nanoporous alumina dielectric; Charge coupled devices; Charge-coupled image sensors; Dielectric devices; Dielectric substrates; Electrodes; Nanoporous materials; Physics; Plasma devices; Surface discharges; Voltage; Dielectric barrier discharges; nanoporous alumina; plasmas;
Journal_Title :
Plasma Science, IEEE Transactions on
DOI :
10.1109/TPS.2005.845284
