Title :
Molecule formation in N and O containing plasmas
Author :
van Helden, J.H. ; Zijlmans, R. ; Engeln, R. ; Schram, D.C.
Author_Institution :
Dept. of Appl. Phys., Eindhoven Univ. of Technol., Netherlands
fDate :
4/1/2005 12:00:00 AM
Abstract :
The visual appearance of an expanding nitrogen plasma with or without oxygen is shown. The interaction of the plasma with a substrate leads to the appearance of additional light, which is ascribed to the formation of excited molecules by association of N and/or O atoms at the substrate.
Keywords :
nitrogen; oxygen; plasma deposition; plasma-wall interactions; N; O; excited molecules; expanding nitrogen plasma; molecule formation; nitrogen-containing plasma; oxygen-containing plasma; plasma deposition; plasma visualization; plasma-substrate interaction; Atomic layer deposition; Atomic measurements; Charge transfer; Electrons; Nitrogen; Plasma sources; Plasma temperature; Spectral analysis; Spontaneous emission; Surface treatment;
Journal_Title :
Plasma Science, IEEE Transactions on
DOI :
10.1109/TPS.2005.845903
