Two-dimensional profiles of electric fields in a radio frequency argon plasma above nonuniformities present on a surface

Author

Barnat, E.V. ; Hebner, G.A.

Author_Institution

Sandia Nat. Labs., Albuquerque, NM, USA

Volume

33

Issue

2

fYear

2005

fDate

4/1/2005 12:00:00 AM

Firstpage

392

Lastpage

393

Abstract

Laser-induced fluorescence-dip spectroscopy was used to measure two-dimensional (2-D) maps of the electric field present in an argon discharge above a ratio frequency-powered, nonuniform surface. Electric fields were obtained from experimentally measured Stark shifts of the energy of argon Rydberg states. The 2-D maps of the electric fields demonstrated that nonuniformities present on an electrode have long-range effects on the structure of the sheath.

Keywords

Rydberg states; Stark effect; argon; high-frequency discharges; plasma diagnostics; plasma sheaths; Ar; Stark shifts; argon Rydberg states; argon discharge; electrode; laser-induced fluorescence-dip spectroscopy; nonuniform surface; radiofrequency argon plasma; radiofrequency-powered surface; sheath structure; two-dimensional electric field profiles; Argon; Electric variables measurement; Fluorescence; Frequency measurement; Nonuniform electric fields; Plasma measurements; Radio frequency; Spectroscopy; Surface discharges; Two dimensional displays;

fLanguage

English

Journal_Title

Plasma Science, IEEE Transactions on

Publisher

ieee

ISSN

0093-3813

Type

jour

DOI

10.1109/TPS.2005.845346

Filename

1420492