Time evolution in visible light emission from high-power Ar pulse-modulated induction thermal plasmas

Author

Tanaka, Yasunori ; Taniguchi, K. ; Muroya, T. ; Uesugi, Y.

Author_Institution

Dept. of Electr. & Electron. Eng., Kanazawa Univ., Japan

Volume

33

Issue

2

fYear

2005

fDate

4/1/2005 12:00:00 AM

Firstpage

406

Lastpage

407

Abstract

Transient behavior of a 15-kW Ar pulse-modulated induction thermal plasma (PMITP) at a pressure of 31 kPa was observed using a high-speed video camera. The PMITP method is one of new techniques for controlling temperature and radical density in time-domain in high-power thermal plasmas. The adoption of a high-power metal-oxide-semiconductor field-effect transistor (MOSFET) inverter power supply makes it possible to sustain PMITPs with high power-conversion efficiency. The high-speed video pictures provide two-dimensional, time-dependent radiation intensity distributions from PMITPs, which are useful for understanding an unique transition behavior of PMITPs.

Keywords

argon; high-speed optical techniques; plasma diagnostics; plasma pressure; plasma temperature; power MOSFET; 15 kW; 31 kPa; Ar; MOSFET inverter power supply; high power Ar pulse-modulated induction thermal plasmas; high power-conversion efficiency; high-power metal-oxide-semiconductor field-effect transistor; high-speed video camera; plasma temperature; radical density; time domain; time evolution; time-dependent radiation intensity distributions; transition behavior; two-dimensional radiation intensity distributions; visible light emission; Argon; Cameras; FETs; MOSFET circuits; Plasma density; Plasma temperature; Power MOSFET; Pulsed power supplies; Temperature control; Time domain analysis; High-speed video; inductively coupled plasma; pulse modulation; thermal plasma;

fLanguage

English

Journal_Title

Plasma Science, IEEE Transactions on

Publisher

ieee

ISSN

0093-3813

Type

jour

DOI

10.1109/TPS.2005.844994

Filename

1420499