• DocumentCode
    776228
  • Title

    Performance of silicon micromachined waveguide at W-band

  • Author

    Becker, J.P. ; East, J.R. ; Katehi, L.P.B.

  • Author_Institution
    Dept. of Electr. & Comput. Eng., Montana State Univ., Bozeman, MT, USA
  • Volume
    38
  • Issue
    13
  • fYear
    2002
  • fDate
    6/20/2002 12:00:00 AM
  • Firstpage
    638
  • Lastpage
    639
  • Abstract
    Fabrication and measurement of low-loss micromachined waveguides developed in (001) silicon through wet anisotropic etching is detailed. Such waveguides are candidates for use in submillimetre-wave systems owing to their compatibility with both efficient micromachined horn antenna elements and planar-based circuitry
  • Keywords
    elemental semiconductors; etching; horn antennas; micromachining; planar waveguides; silicon; submillimetre wave devices; Si; W-band; horn antenna elements; low-loss waveguides; micromachined waveguide; planar-based circuitry; submillimetre-wave systems; wet anisotropic etching;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:20020457
  • Filename
    1015730
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=776228