Title :
Visualization of the sheath-lens focusing effect to disk and square electrodes
Author :
Stamate, Eugen ; Sugai, Hideo
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., Nagoya Univ., Japan
fDate :
4/1/2005 12:00:00 AM
Abstract :
The property of the sheath evolving to one-side biased electrodes to focus in a discrete manner the positive ions to distinct regions on the surface is demonstrated both theoretically and experimentally. Positive ion trajectories to disk and square electrodes are obtained by solving in three dimensions the Poisson equation. The related ion flux is found to be in excellent agreement with the experimental ion flux developed by exposing the electrodes in Ar plasma.
Keywords :
argon; electrodes; plasma diagnostics; plasma sheaths; plasma simulation; plasma transport processes; Ar; Ar plasma; disk electrode; ion flux; one-sided biased electrodes; positive ion trajectories; sheath-lens focusing effect; square electrode; three-dimensional Poisson equation; Argon; Electrodes; Plasma diagnostics; Plasma measurements; Plasma sheaths; Poisson equations; Pollution measurement; Surface contamination; Thickness measurement; Visualization; Focusing effect; ion kinetic; plasma diagnostics; plasma sheath;
Journal_Title :
Plasma Science, IEEE Transactions on
DOI :
10.1109/TPS.2005.845127