DocumentCode
776834
Title
Visualization of the sheath-lens focusing effect to disk and square electrodes
Author
Stamate, Eugen ; Sugai, Hideo
Author_Institution
Dept. of Electr. Eng. & Comput. Sci., Nagoya Univ., Japan
Volume
33
Issue
2
fYear
2005
fDate
4/1/2005 12:00:00 AM
Firstpage
534
Lastpage
535
Abstract
The property of the sheath evolving to one-side biased electrodes to focus in a discrete manner the positive ions to distinct regions on the surface is demonstrated both theoretically and experimentally. Positive ion trajectories to disk and square electrodes are obtained by solving in three dimensions the Poisson equation. The related ion flux is found to be in excellent agreement with the experimental ion flux developed by exposing the electrodes in Ar plasma.
Keywords
argon; electrodes; plasma diagnostics; plasma sheaths; plasma simulation; plasma transport processes; Ar; Ar plasma; disk electrode; ion flux; one-sided biased electrodes; positive ion trajectories; sheath-lens focusing effect; square electrode; three-dimensional Poisson equation; Argon; Electrodes; Plasma diagnostics; Plasma measurements; Plasma sheaths; Poisson equations; Pollution measurement; Surface contamination; Thickness measurement; Visualization; Focusing effect; ion kinetic; plasma diagnostics; plasma sheath;
fLanguage
English
Journal_Title
Plasma Science, IEEE Transactions on
Publisher
ieee
ISSN
0093-3813
Type
jour
DOI
10.1109/TPS.2005.845127
Filename
1420563
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