Abstract :
Microelectromechanical systems (MEMS) is a technology developed from the integrated circuit (IC) industry to create miniature sensors and actuators. In order to understand the design of MEMS devices, a review of fabrication technologies, materials, and power supplies is provided. The fabrication of MEMS comprises of surface machining, bulk micromachining, and molding. The paper also discusses some of the applications of MEMS in medicine and biology such as pressure sensors, accelerometers, human retinal prosthesis, tactile sensor skin and MEMS-based renal replacement system
Keywords :
accelerometers; eye; kidney; medical control systems; microactuators; micromachining; microsensors; moulding; pressure sensors; prosthetics; skin; tactile sensors; MEMS; accelerometers; actuators; biology; bulk micromachining; fabrication; human retinal prosthesis; integrated circuit industry; medicine; microelectromechanical systems; miniature sensors; molding; pressure sensors; renal replacement system; surface machining; tactile sensor skin; Actuators; Biological materials; Biosensors; Fabrication; Integrated circuit technology; Microelectromechanical devices; Microelectromechanical systems; Micromechanical devices; Sensor systems; Tactile sensors;
