MEMS in medicine and biology

Author

Panescu, Dorin

Volume

25

Issue

5

fYear

2006

Firstpage

19

Lastpage

28

Abstract

Microelectromechanical systems (MEMS) is a technology developed from the integrated circuit (IC) industry to create miniature sensors and actuators. In order to understand the design of MEMS devices, a review of fabrication technologies, materials, and power supplies is provided. The fabrication of MEMS comprises of surface machining, bulk micromachining, and molding. The paper also discusses some of the applications of MEMS in medicine and biology such as pressure sensors, accelerometers, human retinal prosthesis, tactile sensor skin and MEMS-based renal replacement system

Keywords

accelerometers; eye; kidney; medical control systems; microactuators; micromachining; microsensors; moulding; pressure sensors; prosthetics; skin; tactile sensors; MEMS; accelerometers; actuators; biology; bulk micromachining; fabrication; human retinal prosthesis; integrated circuit industry; medicine; microelectromechanical systems; miniature sensors; molding; pressure sensors; renal replacement system; surface machining; tactile sensor skin; Actuators; Biological materials; Biosensors; Fabrication; Integrated circuit technology; Microelectromechanical devices; Microelectromechanical systems; Micromechanical devices; Sensor systems; Tactile sensors;

fLanguage

English

Journal_Title

Engineering in Medicine and Biology Magazine, IEEE

Publisher

ieee

ISSN

0739-5175

Type

jour

DOI

10.1109/MEMB.2006.1705742

Filename

1705742