Title :
Wafer level testing for semiconductor laser manufacture via spatially resolved photoluminescence
Author :
Carver, Gary E. ; Heebner, Richard W. ; Astfalk, Greg
Author_Institution :
AT&T Bell Labs., Princeton, NJ, USA
fDate :
12/1/1995 12:00:00 AM
Abstract :
High bandwidth telecommunications depends on the efficient manufacture of semiconductor lasers. The quality of partially processed laser structures can be monitored at the wafer level by spatially resolved photoluminescence (SRPL), providing timely feedback to processing engineers. The same testing procedure can also be applied at the chip level. This allows comparisons of wafer level material quality, chip level material quality, and chip performance
Keywords :
photoluminescence; semiconductor device testing; semiconductor lasers; chip level; chip performance; partially processed laser structures; quality; semiconductor laser manufacture; spatially resolved photoluminescence; testing procedure; wafer level; wafer level testing; Bandwidth; Laser feedback; Monitoring; Optical materials; Photoluminescence; Semiconductor device manufacture; Semiconductor device testing; Semiconductor lasers; Semiconductor materials; Spatial resolution;
Journal_Title :
Selected Topics in Quantum Electronics, IEEE Journal of
DOI :
10.1109/2944.488395