Title :
A technique for producing ordered arrays of metallic nanoclusters by electroless deposition in focused ion beam patterns
Author :
Weller, Robert A. ; Ryle, Wesley T. ; Newton, Allen T. ; McMahon, Matthew D. ; Miller, Timothy M. ; Magruder, Robert H., III
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., Vanderbilt Univ., Nashville, TN, USA
Abstract :
Ordered arrays of Au nanoclusters have been prepared on Si substrates using a combination of focused ion beam (FIB) surface processing and electroless deposition. Particles varying in size from approximately 30 to 100 nm have been produced in regular grid patterns whose geometry is controlled to high precision by the FIB. Potential applications range from engineering of the surface plasmon resonance for numerous optical applications to building structures for tethering organic molecules in specific geometric arrangements.
Keywords :
arrays; atomic force microscopy; electroless deposition; focused ion beam technology; gold; nanostructured materials; nanotechnology; optical materials; scanning electron microscopy; surface plasmon resonance; 30 to 100 nm; AFM image; Au; Au nanoclusters; SEM image; Si; Si substrates; electroless deposition; focused ion beam patterns; focused ion beam surface processing; geometric arrangements; metallic nanoclusters; optical applications; ordered arrays; organic molecule tethering; particle size; regular grid patterns; surface plasmon resonance engineering; Biomedical optical imaging; Geometrical optics; Ion beams; Nanocrystals; Optical surface waves; Particle beam optics; Physics; Plasmons; Resonance; Size control;
Journal_Title :
Nanotechnology, IEEE Transactions on
DOI :
10.1109/TNANO.2003.817528
