Abstract :
Construction of a versatile ion accelerator with a reduced cost has become possible by using compressed dry air as an insulating gas. The price of the developed accelerator is about half the cost of current accelerators. It can be used as an ion implantation apparatus for material analyses such as Rutherford back-scattering spectrometry (RBS) and accelerator mass spectrometry (AMS) as well as for manufacturing optical and semiconductor devices
Keywords :
ion accelerators; ion implantation; semiconductor device manufacture; spectrometer accessories; Rutherford back-scattering spectrometry; accelerator mass spectrometry; cost reduction; current accelerators; dry air compression; implantation apparatus; insulating gas; ion accelerator; material analyses; optical device manufacturing; semiconductor device manufacturing;
Journal_Title :
Electrical Insulation Magazine, IEEE
DOI :
10.1109/MEI.2006.1705860
