A new broad-band method for magnetic thin-film characterization in the microwave range

A new method for magnetic thin-film characterization is presented. New microwave electronic technology challenges require integration of many passive components on chips. Among them, isolators and circulators are nonreciprocal passive devices which contain magnetic materials. The use of thin magnetic films in place of bulk materials seems to be a solution to integrate these components on chips. Hence, it is important to know the magnetic properties of thin films in the microwave range. An isolator is obtained by locating the thin magnetic film in a coplanar line; however, it is often difficult to measure the constitutive parameters of the film before the end of its production. The method described allows in situ measurement of two parameters of the film permeability tensor.