Benzocyclobutene optical waveguides

Author

Kane, Casey F. ; Krchnavek, Robert R.

Author_Institution

Dept. of Electr. Eng., Washington Univ., St. Louis, MO, USA

Volume

7

Issue

5

fYear

1995

fDate

5/1/1995 12:00:00 AM

Firstpage

535

Lastpage

537

Abstract

Single-mode optical waveguides at 1300 nm have been fabricated from the organic polymer benzocyclobutene. This material system utilizes a 535 rmb photodefinable resin for forming the core of the waveguide, allowing the waveguides to be processed in a fashion similar to a negative photoresist. The processing conditions required for the fabrication of single-mode benzocyclobutene optical waveguides are presented. With the measured losses in the waveguide equal to 0.81 dB/cm at 1300 nm, this material system is suitable for use in a variety of optical interconnect applications.<>

Keywords

optical fabrication; optical interconnections; optical losses; optical polymers; optical waveguides; 1300 nm; benzocyclobutene; fabrication; losses; optical interconnect applications; optical waveguides; organic polymer; photodefinable resin; processing conditions; single-mode waveguides; High speed optical techniques; Integrated circuit interconnections; Optical device fabrication; Optical fibers; Optical films; Optical interconnections; Optical losses; Optical materials; Optical polymers; Optical waveguides;

fLanguage

English

Journal_Title

Photonics Technology Letters, IEEE

Publisher

ieee

ISSN

1041-1135

Type

jour

DOI

10.1109/68.384535

Filename

384535