Title :
Benzocyclobutene optical waveguides
Author :
Kane, Casey F. ; Krchnavek, Robert R.
Author_Institution :
Dept. of Electr. Eng., Washington Univ., St. Louis, MO, USA
fDate :
5/1/1995 12:00:00 AM
Abstract :
Single-mode optical waveguides at 1300 nm have been fabricated from the organic polymer benzocyclobutene. This material system utilizes a 535 rmb photodefinable resin for forming the core of the waveguide, allowing the waveguides to be processed in a fashion similar to a negative photoresist. The processing conditions required for the fabrication of single-mode benzocyclobutene optical waveguides are presented. With the measured losses in the waveguide equal to 0.81 dB/cm at 1300 nm, this material system is suitable for use in a variety of optical interconnect applications.<>
Keywords :
optical fabrication; optical interconnections; optical losses; optical polymers; optical waveguides; 1300 nm; benzocyclobutene; fabrication; losses; optical interconnect applications; optical waveguides; organic polymer; photodefinable resin; processing conditions; single-mode waveguides; High speed optical techniques; Integrated circuit interconnections; Optical device fabrication; Optical fibers; Optical films; Optical interconnections; Optical losses; Optical materials; Optical polymers; Optical waveguides;
Journal_Title :
Photonics Technology Letters, IEEE
