A comparison among different setups for measuring on-wafer integrated inductors in RF applications

Author

Aguilera, Jaime ; Matías, Guillermo ; de Nó, Joaquín ; García-Alonso, Andrés ; Berenguer, Roc

Author_Institution

Escuela Superior de Ingenieros, Univ. de Navarra, San Sebastian, Spain

Volume

51

Issue

3

fYear

2002

fDate

6/1/2002 12:00:00 AM

Firstpage

487

Lastpage

491

Abstract

This paper presents a comparison to study the most suitable setup for measuring an integrated inductor using a vector network analyzer. It assumes that the inductor will be modeled with the Π model, the lumped equivalent circuit most often used by designers. We have demonstrated that measuring an inductor with a one-port analyzer is not suitable for an accurate characterization of this type of device. Instead, we propose that the best method is measuring the inductor placed in series between the two ports of the analyzer. The method presented can be extrapolated to the study of how to measure other two-port devices in which the lumped equivalent circuit used to characterize its performance is previously known

Keywords

MMIC; S-parameters; UHF integrated circuits; UHF measurement; equivalent circuits; inductors; integrated circuit measurement; network analysers; sensitivity analysis; Π model; RF applications; S-parameters; VNA; lumped equivalent circuit; measuring setups; on-wafer integrated inductors; on-wafer measurements; two-port devices; vector network analyzer; Electrical resistance measurement; Equivalent circuits; Guidelines; Impedance measurement; Inductors; Integrated circuit measurements; Intelligent networks; Radio frequency; Scattering parameters; Silicon;

fLanguage

English

Journal_Title

Instrumentation and Measurement, IEEE Transactions on

Publisher

ieee

ISSN

0018-9456

Type

jour

DOI

10.1109/TIM.2002.1017719

Filename

1017719