Title :
Thick-film resistor/dielectric interactions in a low temperature co-fired ceramic package
Author :
Sutterlin, Robert C. ; Dayton, Gordon O. ; Biggers, James V.
Author_Institution :
Mater. Res. Lab., Pennsylvania State Univ., University Park, PA, USA
fDate :
5/1/1995 12:00:00 AM
Abstract :
Various commercial thick-film resistors are processed with a low temperature co-fired ceramic (LTCC) packaging material. The electrical properties and microstructure of the resistors are correlated. Three types of resistor/dielectric interfaces are observed. The interactions that occur between the resistor and the dielectric during the co-sintering process are affected by the physical and chemical properties of the glass phase of the resistor material. These interactions between the resistor and the dielectric are kinetically controlled by glass flow at the sintering temperature and thermodynamically driven by the activity gradients between components in the glass phases. The effect of these interactions on the sheet resistance and temperature coefficient of resistance of the resistor materials are discussed
Keywords :
ceramics; integrated circuit packaging; sintering; thick film resistors; LTCC packaging material; activity gradients; co-sintering process; electrical properties; glass flow; low temperature co-fired ceramic; microstructure; resistor/dielectric interfaces; sheet resistance; temperature coefficient of resistance; thick-film resistors; Ceramics; Conducting materials; Dielectric materials; Electric resistance; Glass; High K dielectric materials; Integrated circuit packaging; Resistors; Temperature; Thermal stresses;
Journal_Title :
Components, Packaging, and Manufacturing Technology, Part B: Advanced Packaging, IEEE Transactions on