DocumentCode
781911
Title
Thick-film resistor/dielectric interactions in a low temperature co-fired ceramic package
Author
Sutterlin, Robert C. ; Dayton, Gordon O. ; Biggers, James V.
Author_Institution
Mater. Res. Lab., Pennsylvania State Univ., University Park, PA, USA
Volume
18
Issue
2
fYear
1995
fDate
5/1/1995 12:00:00 AM
Firstpage
346
Lastpage
352
Abstract
Various commercial thick-film resistors are processed with a low temperature co-fired ceramic (LTCC) packaging material. The electrical properties and microstructure of the resistors are correlated. Three types of resistor/dielectric interfaces are observed. The interactions that occur between the resistor and the dielectric during the co-sintering process are affected by the physical and chemical properties of the glass phase of the resistor material. These interactions between the resistor and the dielectric are kinetically controlled by glass flow at the sintering temperature and thermodynamically driven by the activity gradients between components in the glass phases. The effect of these interactions on the sheet resistance and temperature coefficient of resistance of the resistor materials are discussed
Keywords
ceramics; integrated circuit packaging; sintering; thick film resistors; LTCC packaging material; activity gradients; co-sintering process; electrical properties; glass flow; low temperature co-fired ceramic; microstructure; resistor/dielectric interfaces; sheet resistance; temperature coefficient of resistance; thick-film resistors; Ceramics; Conducting materials; Dielectric materials; Electric resistance; Glass; High K dielectric materials; Integrated circuit packaging; Resistors; Temperature; Thermal stresses;
fLanguage
English
Journal_Title
Components, Packaging, and Manufacturing Technology, Part B: Advanced Packaging, IEEE Transactions on
Publisher
ieee
ISSN
1070-9894
Type
jour
DOI
10.1109/96.386272
Filename
386272
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