• DocumentCode
    782522
  • Title

    Electrostriction enhancement of solid-state capacitance sensing

  • Author

    Shkel, Yuri M. ; Ferrier, Nicola J.

  • Author_Institution
    Dept. of Mech. Eng., Univ. of Wisconsin, Madison, WI, USA
  • Volume
    8
  • Issue
    3
  • fYear
    2003
  • Firstpage
    318
  • Lastpage
    325
  • Abstract
    This paper analyzes the performance of a solid-state capacitance sensor that extends classical modeling to incorporate an electrostriction model of isotropic linear elastic dielectrics. A capacitance sensor which incorporates an elastic dielectric layer between the electrodes exhibits higher sensitivity and is more robust than its air-gap or vacuum-gap counterparts. Sensors with polyester and urethane polymer dielectric layers are tested for the response to normal loads and are compared with air-gap setups of same geometry. Experimental data suggest that the solid-state sensor has linear response in loads range up to six orders of magnitude and demonstrates a two to three times stronger output signal than air-gap designs. Potential for future development and application of solid capacitance sensors is discussed.
  • Keywords
    capacitive sensors; electrostriction; spatial variables measurement; air-gap setups; capacitance sensor; deformation measurement; displacement measurement; elastic dielectric layer; electrostriction enhancement; isotropic linear elastic dielectrics; linear response; polyester dielectric layers; sensitivity; solid capacitance sensors; solid-state capacitance sensing; urethane polymer dielectric layers; Air gaps; Capacitance; Capacitive sensors; Dielectrics; Electrodes; Electrostriction; Performance analysis; Robustness; Solid modeling; Solid state circuits;
  • fLanguage
    English
  • Journal_Title
    Mechatronics, IEEE/ASME Transactions on
  • Publisher
    ieee
  • ISSN
    1083-4435
  • Type

    jour

  • DOI
    10.1109/TMECH.2003.816805
  • Filename
    1232291