DocumentCode
782852
Title
A Systematic Approach to Process Selection in MEMS
Author
Quinn, David J. ; Spearing, S. Mark ; Ashby, Mike F. ; Fleck, Norman A.
Volume
15
Issue
5
fYear
2006
fDate
10/1/2006 12:00:00 AM
Firstpage
1039
Lastpage
1050
Abstract
A systematic approach is developed to select manufacturing Process Chains for the generic elements of a MEMS device. A database of MEMS Process Chains and their attendant process attributes is developed from an extensive review of the literature, and used to construct Process Attribute charts. The performance requirements of MEMS beams and trenches are translated into the same set of Process Attributes. This allows for a screening of the Process Chains to obtain a list of candidate manufacturing methods. This method is illustrated in a brief design example.1202
Keywords
Costs; Databases; Fabrication; Helium; Manufacturing processes; Material properties; Microelectromechanical devices; Micromechanical devices; Shape; Wet etching;
fLanguage
English
Journal_Title
Microelectromechanical Systems, Journal of
Publisher
ieee
ISSN
1057-7157
Type
jour
DOI
10.1109/JMEMS.2006.880292
Filename
1707763
Link To Document