A High-Performance MEMS Capacitive Strain Sensing System

Author

Suster, Michael ; Guo, Jun ; Chaimanonart, Nattapon ; Ko, Wen H. ; Young, Darrin J.

Author_Institution

Electr. Eng. & Comput. Sci., Case Western Reserve Univ.

Volume

15

Issue

5

fYear

2006

Firstpage

1069

Lastpage

1077

Abstract

This paper describes a high-performance strain sensing microsystem. The system consists of four parallel differential MEMS capacitive strain sensors with a nominal capacitance value of 440 fF, converting an input strain to a capacitance change with a sensitivity of 265 aF per microstrain (muepsiv), and low-noise integrated sensing electronics, which employ a differential continuous-time synchronous detection architecture converting the capacitive signal to an output voltage for further signal processing. Based on system noise characterization, the prototype design shows a capability of measuring a strain resolution of 0.9 nepsiv/radicHz, while demonstrating a maximum dc input stain range of 1000 muepsiv. The overall system consumes 1.5 mA dc current from a 3-V supply

Keywords

capacitive sensors; microsensors; strain sensors; 1.5 mW; 3 V; 440 fF; MEMS sensor; capacitive sensor; continuous-time detection; differential detection; integrated sensing electronics; noise characterization; signal processing; strain sensor; synchronous detection; Capacitance; Capacitive sensors; Micromechanical devices; Noise measurement; Prototypes; Sensor systems; Signal processing; Signal resolution; Strain measurement; Voltage;

fLanguage

English

Journal_Title

Microelectromechanical Systems, Journal of

Publisher

ieee

ISSN

1057-7157

Type

jour

DOI

10.1109/JMEMS.2006.881489

Filename

1707766