DocumentCode :
783064
Title :
Design, Fabrication, and Characterization of a High Fill-Factor, Large Scan-Angle, Two-Axis Scanner Array Driven by a Leverage Mechanism
Author :
Tsai, Jui-che ; Wu, Ming C.
Volume :
15
Issue :
5
fYear :
2006
fDate :
10/1/2006 12:00:00 AM
Firstpage :
1209
Lastpage :
1213
Abstract :
We report on the design, fabrication, and characterization of a high fill-factor, large scan-angle, two-axis scanner array. The two-axis microelectromechanical-systems (MEMS) mirror is driven by electrostatic vertical comb-drive actuators through four motion amplifying levers. The maximum mechanical rotation angles are 
at 75 V for both axes, leading to total optical scan angle of 26.8 
. The resonant frequency is 5.9 kHz before metallization. A linear fill factor of 98% is achieved for the one-dimensional (1-D) micromirror array. This 1D array of two-axis micromirrors was designed for 
wavelength-selective switches (WSSs). In addition to two-axis rotation, piston motion with a stroke of 11.7 
is also attained.1731
at 75 V for both axes, leading to total optical scan angle of 26.8 . The resonant frequency is 5.9 kHz before metallization. A linear fill factor of 98% is achieved for the one-dimensional (1-D) micromirror array. This 1D array of two-axis micromirrors was designed for wavelength-selective switches (WSSs). In addition to two-axis rotation, piston motion with a stroke of 11.7 is also attained.1731Keywords :
Comb-drive actuator; leverage mechanism; two-axis micromirror; wavelength-division multiplexing (WDM); wavelength-selective switch (WSS); Electrostatic actuators; Metallization; Micromechanical devices; Micromirrors; Mirrors; Optical device fabrication; Optical switches; Pistons; Resonant frequency; Stimulated emission; Comb-drive actuator; leverage mechanism; two-axis micromirror; wavelength-division multiplexing (WDM); wavelength-selective switch (WSS);
fLanguage :
English
Journal_Title :
Microelectromechanical Systems, Journal of
Publisher :
ieee
ISSN :
1057-7157
Type :
jour
DOI :
10.1109/JMEMS.2006.880291
Filename :
1707781
Link To Document :
