Title :
High-frequency input impedance characterization of dielectric films for power-ground planes
Author :
Obrzut, Jan ; Anopchenko, Aleksei
Author_Institution :
Nat. Inst. of Stand. & Technol., Gaithersburg, MD, USA
Abstract :
Broadband impedance characterization of high dielectric constant (high-k) films was performed using a coaxial test fixture configuration. The presented coaxial test fixture and broadband measurement methodology of impedance for high-k films minimizes systematic uncertainties by reducing the interconnection inductance and improving the calibration procedure. In the APC-7 configuration, the technique enables accurate evaluation of impedance at frequencies of 100 MHz to 10 GHz with resolution of 0.01 Ω. The electrical characteristic of high-k films was found to be consistent with a capacitive load without significant contribution from the circuit inductance that typically dominates the high-frequency response. The experimental data and numerical simulations showed that high-k organic-ceramic composite materials could considerably suppress resonant behavior of the power-ground planes. It was found that high-k organic resins filled with ferroelectric ceramic powders exhibit a high-frequency dielectric loss that increases with increasing volume fraction of the ceramic component. The dielectric dispersion and the corresponding dielectric loss of organic-ceramic hybrid materials can serve as an effective mechanism for suppressing the resonant standing waves in power-ground planes.
Keywords :
calibration; composite insulating materials; dielectric relaxation; dielectric thin films; electric impedance measurement; filled polymers; microwave measurement; test equipment; 100 MHz to 10 GHz; APC-7 configuration; HF dielectric loss; HF input impedance characterization; broadband impedance characterization; broadband measurement methodology; calibration procedure; capacitive load; coaxial test fixture configuration; dielectric dispersion; electrical characteristic; ferroelectric ceramic powder filling; high dielectric constant films; high-k films; interconnection inductance; organic resins; organic-ceramic composite materials; organic-ceramic hybrid materials; power-ground planes; resonant standing wave suppression; Ceramics; Coaxial components; Dielectric films; Dielectric losses; Ferroelectric materials; Fixtures; High K dielectric materials; High-K gate dielectrics; Impedance; Resonance;
Journal_Title :
Instrumentation and Measurement, IEEE Transactions on
DOI :
10.1109/TIM.2003.815984