DocumentCode :
783223
Title :
Micromachined High-Aspect-Ratio Parylene Spring and Its Application to Low-Frequency Accelerometers
Author :
Suzuki, Yuji ; Tai, Yu-Chong
Volume :
15
Issue :
5
fYear :
2006
fDate :
10/1/2006 12:00:00 AM
Firstpage :
1364
Lastpage :
1370
Abstract :
A new microfabrication technology for high-aspect- ratio parylene structure has been developed for soft spring applications. Free-standing parylene beams with widths of 10–40 
and aspect ratios of 10–20 have been successfully fabricated. Since parylene has a small Young\´s modulus, a high-aspect-ratio beam with a spring constant of the order of 
has been realized. The large yield strain of parylene enables a test structure to have a large-amplitude oscillation of 600 
, without any failure of the high-aspect-ratio springs. An early prototype of in-plane capacitive accelerometer was also developed. It was found that its resonant frequency is as low as 37 Hz, and the noise spectral density is 64 
.1606
and aspect ratios of 10–20 have been successfully fabricated. Since parylene has a small Young\´s modulus, a high-aspect-ratio beam with a spring constant of the order of has been realized. The large yield strain of parylene enables a test structure to have a large-amplitude oscillation of 600 , without any failure of the high-aspect-ratio springs. An early prototype of in-plane capacitive accelerometer was also developed. It was found that its resonant frequency is as low as 37 Hz, and the noise spectral density is 64 .1606Keywords :
Capacitive accelerometer; high-aspect-ratio beam; low spring constant; parylene; Accelerometers; Atomic force microscopy; Capacitive sensors; Crystalline materials; Internal stresses; Polymers; Prototypes; Springs; Testing; Transducers; Capacitive accelerometer; high-aspect-ratio beam; low spring constant; parylene;
fLanguage :
English
Journal_Title :
Microelectromechanical Systems, Journal of
Publisher :
ieee
ISSN :
1057-7157
Type :
jour
DOI :
10.1109/JMEMS.2006.879706
Filename :
1707796
Link To Document :
