Light injection in SOI microwaveguides using high-efficiency grating couplers

Author

Vivien, Laurent ; Pascal, Daniel ; Lardenois, Sebastien ; Marris-morini, Delphine ; Cassan, Eric ; Grillot, Frédéric ; Laval, Suzanne ; Fédéli, Jean-Marc ; El Melhaoui, Loubna

Author_Institution

Inst. d´´Electron. Fondamentale, Orsay

Volume

24

Issue

10

fYear

2006

Firstpage

3810

Lastpage

3815

Abstract

An experimental characterization of the grating couplers for sub-micrometer silicon-on-insulator (SOI) waveguides is presented. The grating couplers have been designed, realized, and characterized for the +1 diffraction order at an operating wavelength of 1.31 mum for TE polarization. At the resonant angle, a coupling efficiency higher than 55% has been measured. The angular coupling range and the wavelength tolerance have been evaluated to 3deg and 20 nm, respectively. The grating coupler is followed by a taper, and about 50% of the input power at 1.31 mum is coupled into sub-micrometer rib and strip SOI waveguides. The ration between light power decoupled toward the cladding and light power decoupled toward the substrate is about three

Keywords

diffraction gratings; micro-optics; optical couplers; optical design techniques; optical waveguides; rib waveguides; silicon-on-insulator; 1.31 mum; SOI microwaveguides; coupling efficiency; grating couplers; light injection; silicon-on-insulator waveguides; Couplers; Gratings; Integrated optics; Optical devices; Optical films; Optical refraction; Optical variables control; Optical waveguides; Silicon; Substrates; Grating coupler; optical coupling; rib waveguide; silicon-on-insulator (SOI);

fLanguage

English

Journal_Title

Lightwave Technology, Journal of

Publisher

ieee

ISSN

0733-8724

Type

jour

DOI

10.1109/JLT.2006.878060

Filename

1707847