Title :
Frequency Multiplexed MEMS Actuators and Switches
Author :
Wang, Minfeng ; Zhang, Yang ; Li, G.P. ; Bachman, Mark
Author_Institution :
Dept. of Electr. Eng., Univ. of California, Irvine, Irvine, CA, USA
Abstract :
We report a novel method for addressing a set of microelectromechanical system (MEMS) actuators using an oscillating signal to drive an actuator into resonance and then into a latched state. Based on the unique frequency response characteristics of individual actuators, multiplexed addressing of multiple devices in an array can be accomplished by selecting and combining appropriate driving signals on a single control line. This simplified control architecture of MEMS actuators eases implementation of multiple devices and enables large-scale integration of programmable microactuator systems, such as MEMS switch arrays.
Keywords :
microactuators; microswitches; MEMS switch arrays; MEMS switches; control architecture; frequency multiplexed MEMS actuators; frequency response characteristics; latched state; microelectromechanical system actuators; programmable microactuator system; Actuators; Arrays; Frequency division multiplexing; Micromechanical devices; Resonant frequency; Actuators; addressable microelectromechanical system (MEMS); electromagnetic actuation; latching; switch array;
Journal_Title :
Electron Device Letters, IEEE
DOI :
10.1109/LED.2012.2224312
