• DocumentCode
    784383
  • Title

    A Technique to Extract High- k IPD Stack-Layer Thicknesses From C – $k$ dielectrics; thickness measurement;

  • fLanguage
    English
  • Journal_Title
    Electron Device Letters, IEEE
  • Publisher
    ieee
  • ISSN
    0741-3106
  • Type

    jour

  • DOI
    10.1109/LED.2009.2018129
  • Filename
    4895306
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=784383