DocumentCode :
784383
Title :
A Technique to Extract High- k IPD Stack-Layer Thicknesses From C $k$ dielectrics; thickness measurement;
fLanguage :
English
Journal_Title :
Electron Device Letters, IEEE
Publisher :
ieee
ISSN :
0741-3106
Type :
jour
DOI :
10.1109/LED.2009.2018129
Filename :
4895306
Link To Document :
بازگشت