Title :
Design method for sensing body of differential pressure transmitter using silicon diaphragm-type pressure sensor
Author :
Matsuoka, Y. ; Yamamoto, Y. ; Tobita, T. ; Shimada, S. ; Yasukawa, A.
Author_Institution :
Instrum. Div., Hitachi Ltd., Ibaraki, Japan
fDate :
6/1/1995 12:00:00 AM
Abstract :
This paper describes a design method for the three-diaphragm-type sensing body of a differential pressure transmitter. This sensing body protects the silicon diaphragm-type pressure sensor from over-pressure. The design method includes information on how to decide the stiffness of each metal diaphragm and the liquid quantity needed to fill the sensing body. The differential pressure transmitter, with significant stabilities, has zero-influence errors of static pressure and over-pressure of less than -0.2% and ±0.1%, respectively, and is obtained at a measuring span of 25 kPa and a line pressure of 15 MPa
Keywords :
electric sensing devices; elemental semiconductors; high-pressure techniques; pressure measurement; pressure sensors; pressure transducers; silicon; 15 MPa; 25 kPa; Si; Si diaphragm-type pressure sensor; differential pressure transmitter; line pressure; metal diaphragm; over-pressure; static pressure; stiffness; three-diaphragm-type sensing body; zero-influence errors; Design methodology; Piezoresistance; Pressure measurement; Protection; Seals; Sensor phenomena and characterization; Silicon; Springs; Stability; Transmitters;
Journal_Title :
Instrumentation and Measurement, IEEE Transactions on
