Title :
A silicon microactuator using integrated microfabrication technology
Author :
Lu, Y. ; Yang, J.P. ; Chen, J. ; Chen, S.X.
Author_Institution :
Data Storage Inst., Singapore
Abstract :
The authors propose a new type of MEMS actuator which is suitable for integration with read/write (R/W) head and AlTiC slider in hard disk drives (HDDs). Double-sided wafer patterning and adhesive wafer bonding techniques are used in fabrication. The displacement stroke of the R/W head, which attached on the MEMS actuator, can reach ±0.5 μm when the input voltage is ±20 V. The dynamic performances of the MEMS actuator are simulated by the finite-element method.
Keywords :
aluminium compounds; disc drives; elemental semiconductors; finite element analysis; hard discs; magnetic heads; microactuators; pattern formation; silicon; titanium compounds; 0.5 micron; 20 V; AlTiC slider; MEMS actuator; Si microactuator; adhesive wafer bonding techniques; double-sided wafer patterning; finite-element method; hard disk drives; integrated microfabrication technology; read/write head; Actuators; Electrostatics; Fabrication; Hard disks; Magnetic heads; Microactuators; Micromechanical devices; Silicon on insulator technology; Voltage; Wafer bonding;
Journal_Title :
Magnetics, IEEE Transactions on
DOI :
10.1109/TMAG.2003.815443
