Size-Dependent Effects on the Temperature Coefficient of Resistance of Carbon Nanotube Vias

Author

Vollebregt, Sten ; Banerjee, Sean ; Beenakker, Kees ; Ishihara, Ryoichi

Author_Institution

Dept. of Microelectron., Delft Univ. of Technol., Delft, Netherlands

Volume

60

Issue

12

fYear

2013

fDate

Dec. 2013

Firstpage

4085

Lastpage

4089

Abstract

Carbon nanotube (CNT) vias were fabricated at 500 ^°C with different widths and lengths. The electrical resistance of the CNT vias was measured using four-point probe structures at temperatures between 25 ^°C and 190 ^°C. It was found that the temperature coefficient of resistance (TCR) of the CNT vias changes with both length and width. Most of the vias displayed a negative TCR between -300 and -400 ppm/K, against 3900 ppm/K for Cu, but for wider and shorter vias, this value becomes positive. A simple model is introduced, which can explain the length-dependent behavior.

Keywords

carbon nanotubes; integrated circuit interconnections; C; CNT vias; carbon nanotube vias; electrical resistance; four-point probe structures; length-dependent behavior; size-dependent effects; temperature 25 C to 190 C; temperature 500 C; temperature coefficient; Carbon nanotubes; Contact resistance; Electrical resistance measurement; Metals; Probes; Resistance; Temperature measurement; Carbon nanotubes (CNT); electrical resistance; interconnections; temperature dependence;

fLanguage

English

Journal_Title

Electron Devices, IEEE Transactions on

Publisher

ieee

ISSN

0018-9383

Type

jour

DOI

10.1109/TED.2013.2287640

Filename

6654250