Soft magnetic properties of Fe-TM-C-N (TM:Zr,Nb) nanocrystalline films

Author

Ryu, H.J. ; Lee, J.J. ; Han, S.H. ; Kim, H.J. ; Kang, LK ; Choi, J.O.

Author_Institution

Dept. of Metall. Eng., Seoul Nat. Univ., South Korea

Volume

31

Issue

6

fYear

1995

fDate

11/1/1995 12:00:00 AM

Firstpage

3868

Lastpage

3870

Abstract

Soft magnetic properties of Fe-TM-C-N (TM:Zr,Nb) films, fabricated by RF reactive sputtering in Ar⁺N₂ atmosphere, were investigated. The as-deposited films having mixed phases of amorphous and α-Fe or mostly crystalline α-Fe phase showed nanocrystalline structure upon annealing. The best soft magnetic properties achieved in these films are; H_c of 0.06 Oe, μ _eff 2750 (1 MHz) and 4 πMs, of 16.8 kG in Fe-Zr-C-N film and H_c of 0.31 Oe, μ_eff of 2100 (1 MHz) and 4 πMs of 15.5 kG in Fe-Nb-C-N film. The fine grained α-Fe structure, together with very fine TM(C,N) precipitates which were formed at an early stage of crystallization, is considered to be one of the main factors for the excellent soft magnetic properties. The Fe-Zr-C-N films exhibit better soft magnetic properties than those of the Fe-Nb-C-N films, which is considered to be due to the magnitude of the formation enthalpy

Keywords

amorphous magnetic materials; annealing; ferromagnetic materials; iron alloys; magnetic particles; nanostructured materials; niobium alloys; precipitation; soft magnetic materials; sputtered coatings; zirconium alloys; 1 MHz; 15.5 kG; 16.8 kG; Fe-Nb-C-N nanocrystalline film; Fe-Zr-C-N nanocrystalline films; FeNbCN; FeZrCN; RF reactive sputtering; amorphous phase; annealing; crystallization; fine grained structure; formation enthalpy; precipitates; soft magnetic properties; Amorphous materials; Annealing; Argon; Atmosphere; Crystallization; Magnetic films; Magnetic properties; Nanostructures; Radio frequency; Sputtering;

fLanguage

English

Journal_Title

Magnetics, IEEE Transactions on

Publisher

ieee

ISSN

0018-9464

Type

jour

DOI

10.1109/20.489799

Filename

489799