Title :
Integrated microwave sensors for cavity-length measurement in machine engineering
Author :
Megej, Alexander ; Beilenhoff, Klaus ; Schussler, Martin ; Ziroff, Andreas ; Mottet, Bastian ; Yilmazoglu, Oktay ; Mutamba, Kabula ; Hamann, Claus D. ; Baican, Roman ; Hartnagel, Hans L.
Author_Institution :
Lab. for EM-Fields & Microwave Electron., Swiss Fed. Inst. of Technol., Zurich, Switzerland
fDate :
12/1/2002 12:00:00 AM
Abstract :
A novel measurement procedure using microwaves is presented. The implemented sensor prototype determines the length of a cylindrical cavity (e.g., a hydraulic system) with submillimeter accuracy in real time. The principle of operation is based on the detection of the resonance-frequency distribution in a cavity resonator.
Keywords :
cavity resonators; electric sensing devices; hydraulic systems; length measurement; microwave measurement; cavity resonator; cavity-length measurement; cylindrical cavity; hydraulic system; integrated microwave sensors; machine engineering; measurement procedure; resonance-frequency distribution; submillimeter accuracy; Integrated circuit measurements; Intelligent sensors; Length measurement; Mechanical sensors; Mechanical variables measurement; Microwave measurements; Microwave sensors; Prototypes; Resonance; Sensor phenomena and characterization;
Journal_Title :
Microwave Theory and Techniques, IEEE Transactions on
DOI :
10.1109/TMTT.2002.805148
