Integrated microwave sensors for cavity-length measurement in machine engineering

Author

Megej, Alexander ; Beilenhoff, Klaus ; Schussler, Martin ; Ziroff, Andreas ; Mottet, Bastian ; Yilmazoglu, Oktay ; Mutamba, Kabula ; Hamann, Claus D. ; Baican, Roman ; Hartnagel, Hans L.

Author_Institution

Lab. for EM-Fields & Microwave Electron., Swiss Fed. Inst. of Technol., Zurich, Switzerland

Volume

50

Issue

12

fYear

2002

fDate

12/1/2002 12:00:00 AM

Firstpage

3070

Lastpage

3076

Abstract

A novel measurement procedure using microwaves is presented. The implemented sensor prototype determines the length of a cylindrical cavity (e.g., a hydraulic system) with submillimeter accuracy in real time. The principle of operation is based on the detection of the resonance-frequency distribution in a cavity resonator.

Keywords

cavity resonators; electric sensing devices; hydraulic systems; length measurement; microwave measurement; cavity resonator; cavity-length measurement; cylindrical cavity; hydraulic system; integrated microwave sensors; machine engineering; measurement procedure; resonance-frequency distribution; submillimeter accuracy; Integrated circuit measurements; Intelligent sensors; Length measurement; Mechanical sensors; Mechanical variables measurement; Microwave measurements; Microwave sensors; Prototypes; Resonance; Sensor phenomena and characterization;

fLanguage

English

Journal_Title

Microwave Theory and Techniques, IEEE Transactions on

Publisher

ieee

ISSN

0018-9480

Type

jour

DOI

10.1109/TMTT.2002.805148

Filename

1098034