• DocumentCode
    788695
  • Title

    The effect of annealing on the microstructure and magnetic properties of Fe-Ta-Cr-N thin films

  • Author

    Wong, Bunsen Y. ; Suwabe, S. ; Tsuneda, F. ; Laughlin, David E.

  • Author_Institution
    Dept. of MSE, Carnegie Mellon Univ., Pittsburgh, PA, USA
  • Volume
    31
  • Issue
    6
  • fYear
    1995
  • fDate
    11/1/1995 12:00:00 AM
  • Firstpage
    3967
  • Lastpage
    3969
  • Abstract
    The effect of Tanneal on Fe-Ta-Cr-N thin films has been studied. Crystallization of Fe was found to precede TaN. Results showed that Tanneal controls not only the grain size but also the amount of Ta and N which is in solution within the Fe matrix and the magnetic properties was determined largely by these two factors. In addition, TaN was found to nucleate both homogeneously and heterogeneously, according to the K-S OR, with respect to the Fe grain
  • Keywords
    annealing; chromium alloys; crystal microstructure; crystallisation; ferromagnetic materials; grain size; iron alloys; soft magnetic materials; sputtered coatings; tantalum alloys; Fe matrix; Fe-Ta-Cr-N; Fe-Ta-Cr-N thin films; annealing; crystallization; grain size; magnetic properties; microstructure; nucleation; Amorphous materials; Annealing; Crystallization; Intermetallic; Iron; Magnetic films; Magnetic properties; Microstructure; Optical films; Temperature;
  • fLanguage
    English
  • Journal_Title
    Magnetics, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9464
  • Type

    jour

  • DOI
    10.1109/20.489832
  • Filename
    489832
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=788695