Title :
GaAlAs/GaAs micromachined thermally tunable vertical cavity filter with low tuning voltage
Author :
Amano, T. ; Koyama, E. ; Arai, M.
Author_Institution :
Microsystem Res. Center, Tokyo Inst. of Technol., Yokohama, Japan
fDate :
7/4/2002 12:00:00 AM
Abstract :
A GaAlAs/GaAs micromachined thermally tunable vertical cavity filter with a low tuning voltage is proposed and its fabrication described. The integration of a thermal strain control layer and heating element enables wavelength tuning induced by heating. Wavelength tuning of 23.2 nm with a low tuning voltage of 4.7 V is demonstrated experimentally
Keywords :
III-V semiconductors; aluminium compounds; gallium arsenide; micro-optics; micromachining; optical fabrication; optical filters; optical tuning; thermo-optical effects; 4.7 V; GaAlAs-GaAs; GaAlAs/GaAs micromachined thermally tunable vertical cavity filter; fabrication; heating element; thermal strain control layer; tuning voltage; wavelength tuning;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:20020490
