DocumentCode
789076
Title
Handbook of thin film deposition - processes and technologies, 2nd edition [Book Review]
Author
Shea, John
Volume
18
Issue
4
fYear
2002
Firstpage
47
Lastpage
47
Keywords
Book reviews; Chemical vapor deposition; Control systems; Manufacturing industries; Microelectronics; Optical films; Optical sensors; Photochemistry; Sputtering; Transistors;
fLanguage
English
Journal_Title
Electrical Insulation Magazine, IEEE
Publisher
ieee
ISSN
0883-7554
Type
jour
DOI
10.1109/MEI.2002.1019909
Filename
1019909
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