Title :
Handbook of thin film deposition - processes and technologies, 2nd edition [Book Review]
Keywords :
Book reviews; Chemical vapor deposition; Control systems; Manufacturing industries; Microelectronics; Optical films; Optical sensors; Photochemistry; Sputtering; Transistors;
Journal_Title :
Electrical Insulation Magazine, IEEE
DOI :
10.1109/MEI.2002.1019909
