Sputter deposition of magnetic thin films onto plastic: the effect of undercoat and spacer layer composition on the magnetic properties of multilayer permalloy thin films

Author

Grimes, Craig A.

Author_Institution

Dept. of Electr. Eng., Kentucky Univ., Lexington, KY, USA

Volume

31

Issue

6

fYear

1995

fDate

11/1/1995 12:00:00 AM

Firstpage

4109

Lastpage

4111

Abstract

The coercive force, anisotropy field, and permeability spectra of magnetically soft, multilayer thin films sputtered onto plastic for use as identification markers or EMI shields is reported. Substrate effects including use of undercoat layers, layers separating the substrate from the magnetic stack, are reported. It is found that undercoat layers act to increase the soft magnetic properties. Effects of stack design, including spacer layer material and stack geometry, on the magnetic properties are also reported

Keywords

Permalloy; coercive force; ferromagnetic materials; magnetic anisotropy; magnetic multilayers; magnetic permeability; soft magnetic materials; sputtered coatings; EMI shields; FeNi; anisotropy field; coercive force; identification markers; magnetic properties; magnetic stack; magnetic thin films; magnetically soft multilayer thin films; multilayer permalloy thin films; permeability spectra; plastic substrate; spacer layer composition; spacer layer material; sputter deposition; stack geometry; undercoat; Magnetic anisotropy; Magnetic films; Magnetic materials; Magnetic properties; Magnetic separation; Magnetic shielding; Perpendicular magnetic anisotropy; Plastics; Soft magnetic materials; Sputtering;

fLanguage

English

Journal_Title

Magnetics, IEEE Transactions on

Publisher

ieee

ISSN

0018-9464

Type

jour

DOI

10.1109/20.489877

Filename

489877