DocumentCode
789564
Title
Magnetic fluid based variable inductors for inductively coupled plasma applications
Author
Oka, H. ; Dawson, F.P. ; Sakuta, T. ; Lavers, J.D.
Author_Institution
Fac. of Eng., Iwate Univ., Morioka, Japan
Volume
31
Issue
6
fYear
1995
fDate
11/1/1995 12:00:00 AM
Firstpage
4175
Lastpage
4177
Abstract
This paper identifies a resonant LCC circuit zero voltage switched power supply topology which can be used in conjunction with a variable inductor in inductively coupled plasma applications. Steady state, fundamental component, simulation results confirm that the use of a variable inductor allows the operating power range for zero voltage switching to be extended without having to change the switching frequency
Keywords
magnetic fluids; plasma applications; power inductors; switched mode power supplies; inductively coupled plasma applications; magnetic fluid based variable inductors; resonant LCC circuit zero voltage switched power supply topology; switching frequency; zero voltage switching; Circuit topology; Coupling circuits; Inductors; Magnetic liquids; Magnetic resonance; Plasma applications; Power supplies; RLC circuits; Switching circuits; Zero voltage switching;
fLanguage
English
Journal_Title
Magnetics, IEEE Transactions on
Publisher
ieee
ISSN
0018-9464
Type
jour
DOI
10.1109/20.489917
Filename
489917
Link To Document