Title :
Magnetic fluid based variable inductors for inductively coupled plasma applications
Author :
Oka, H. ; Dawson, F.P. ; Sakuta, T. ; Lavers, J.D.
Author_Institution :
Fac. of Eng., Iwate Univ., Morioka, Japan
fDate :
11/1/1995 12:00:00 AM
Abstract :
This paper identifies a resonant LCC circuit zero voltage switched power supply topology which can be used in conjunction with a variable inductor in inductively coupled plasma applications. Steady state, fundamental component, simulation results confirm that the use of a variable inductor allows the operating power range for zero voltage switching to be extended without having to change the switching frequency
Keywords :
magnetic fluids; plasma applications; power inductors; switched mode power supplies; inductively coupled plasma applications; magnetic fluid based variable inductors; resonant LCC circuit zero voltage switched power supply topology; switching frequency; zero voltage switching; Circuit topology; Coupling circuits; Inductors; Magnetic liquids; Magnetic resonance; Plasma applications; Power supplies; RLC circuits; Switching circuits; Zero voltage switching;
Journal_Title :
Magnetics, IEEE Transactions on
