• DocumentCode
    790312
  • Title

    Preparation of high-quality hexaferrite thick films by an improved liquid phase epitaxy deposition technique

  • Author

    Yoon, S.D. ; Vittoria, C.

  • Author_Institution
    Dept. of Electr. Comput. Eng., Northeastern Univ., Boston, MA, USA
  • Volume
    39
  • Issue
    5
  • fYear
    2003
  • Firstpage
    3163
  • Lastpage
    3165
  • Abstract
    In this paper, we report on the deposition of thick and high-quality films of BaM on (111) gadolinium gallium garnet (GGG) and m-plane, (11_00) or (101_0), sapphire (Al2O3) substrates. The deposition rate is sufficiently high to allow for large batch production. The total thickness ranged from 50 to 200 μm for 2 h of the liquid phase epitaxy deposition. Therefore, the growth rate of the films ranged from ∼25 to ∼100 μm/h. In previous work, growth rates in BaM films were quite small. Equally important, the ferrimagnetic resonance (FMR) linewidth (ΔH) was ∼0.068 kOe at 58 GHz for the BaM films on (111) GGG and ∼0.08 kOe at 59.9 GHz for the BaM film on m-plane sapphire substrates. The FMR linewidth films of thick BaM films deposited by pulsed laser deposition in earlier work ranged from 0.5 to 1.2 kOe.
  • Keywords
    barium compounds; ferrimagnetic resonance; ferrites; liquid phase epitaxial growth; magnetic epitaxial layers; 2 h; 50 to 200 micron; 58 GHz; 59.9 GHz; Al2O3; BaFe12O19; GGG substrates; GdGG; GdGa5O12; batch production; deposition rate; ferrimagnetic resonance linewidth; high-quality hexaferrite thick films; improved liquid phase epitaxy deposition technique; sapphire substrates; total thickness; Epitaxial growth; Ferrimagnetic films; Ferrite films; Frequency; Garnet films; Magnetic films; Magnetic resonance; Pulsed laser deposition; Substrates; Thick films;
  • fLanguage
    English
  • Journal_Title
    Magnetics, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9464
  • Type

    jour

  • DOI
    10.1109/TMAG.2003.816044
  • Filename
    1233332