DocumentCode :
790312
Title :
Preparation of high-quality hexaferrite thick films by an improved liquid phase epitaxy deposition technique
Author :
Yoon, S.D. ; Vittoria, C.
Author_Institution :
Dept. of Electr. Comput. Eng., Northeastern Univ., Boston, MA, USA
Volume :
39
Issue :
5
fYear :
2003
Firstpage :
3163
Lastpage :
3165
Abstract :
In this paper, we report on the deposition of thick and high-quality films of BaM on (111) gadolinium gallium garnet (GGG) and m-plane, (11_00) or (101_0), sapphire (Al2O3) substrates. The deposition rate is sufficiently high to allow for large batch production. The total thickness ranged from 50 to 200 μm for 2 h of the liquid phase epitaxy deposition. Therefore, the growth rate of the films ranged from ∼25 to ∼100 μm/h. In previous work, growth rates in BaM films were quite small. Equally important, the ferrimagnetic resonance (FMR) linewidth (ΔH) was ∼0.068 kOe at 58 GHz for the BaM films on (111) GGG and ∼0.08 kOe at 59.9 GHz for the BaM film on m-plane sapphire substrates. The FMR linewidth films of thick BaM films deposited by pulsed laser deposition in earlier work ranged from 0.5 to 1.2 kOe.
Keywords :
barium compounds; ferrimagnetic resonance; ferrites; liquid phase epitaxial growth; magnetic epitaxial layers; 2 h; 50 to 200 micron; 58 GHz; 59.9 GHz; Al2O3; BaFe12O19; GGG substrates; GdGG; GdGa5O12; batch production; deposition rate; ferrimagnetic resonance linewidth; high-quality hexaferrite thick films; improved liquid phase epitaxy deposition technique; sapphire substrates; total thickness; Epitaxial growth; Ferrimagnetic films; Ferrite films; Frequency; Garnet films; Magnetic films; Magnetic resonance; Pulsed laser deposition; Substrates; Thick films;
fLanguage :
English
Journal_Title :
Magnetics, IEEE Transactions on
Publisher :
ieee
ISSN :
0018-9464
Type :
jour
DOI :
10.1109/TMAG.2003.816044
Filename :
1233332
Link To Document :
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