DocumentCode
790323
Title
High-frequency magnetic properties of FeCoBSi/SiO2 and (FeCo/CoB)/SiO2 multilayer thin films
Author
Frommberger, Michael ; Ludwig, Alfred ; Sehrbrock, Angelika ; Quandt, Eckhard
Author_Institution
Smart Mater. Group, Center for Adv. Eur. Studies & Res., Bonn, Germany
Volume
39
Issue
5
fYear
2003
Firstpage
3166
Lastpage
3168
Abstract
Applications of soft magnetic magnetostrictive thin films in high-frequency devices such as inductors, transmission lines, or stress sensors require low magnetic losses. Samples of about 2-μm thick FeCoBSi/SiO2 and (FeCo/CoB)/SiO2 multilayers with varying SiO2 thickness between 10 and 100 nm have been fabricated. The magnetic properties of these samples have been characterized by vibrating sample magnetometry. Impedance measurements in the kilohertz to megahertz range and permeameter measurements up to 8 GHz were carried out to determine the high-frequency behavior. The measurements showed an improvement in the quality factor of the films due to the dielectric lamination.
Keywords
boron alloys; cobalt alloys; eddy current losses; ferromagnetic materials; inductors; iron alloys; magnetic leakage; magnetic multilayers; magnetic sensors; magnetostriction; silicon alloys; silicon compounds; transmission lines; (FeCo-CoB)-SiO2; (FeCo/CoB)/SiO2; 10 to 100 nm; 2 micron; 8 GHz; FeCoBSi-SiO2; FeCoBSi/SiO2; dielectric lamination; high-frequency magnetic properties; impedance measurements; inductors; low magnetic losses; multilayer thin films; soft magnetic magnetostrictive thin films; stress sensors; transmission lines; vibrating sample magnetometry; Dielectric measurements; Impedance measurement; Magnetic devices; Magnetic films; Magnetic properties; Magnetostriction; Magnetostrictive devices; Soft magnetic materials; Thin film inductors; Thin film sensors;
fLanguage
English
Journal_Title
Magnetics, IEEE Transactions on
Publisher
ieee
ISSN
0018-9464
Type
jour
DOI
10.1109/TMAG.2003.816045
Filename
1233333
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