Title :
The effect of surface topography on the soft magnetic properties of FeAlN films
Author :
Zheng, Pethui ; Bain, James A. ; Kryder, Mark H.
Author_Institution :
Data Storage Syst. Center, Carnegie Mellon Univ., Pittsburgh, PA, USA
fDate :
11/1/1995 12:00:00 AM
Abstract :
FeAlN films were deposited on patterned lines of photoresist, hardcured before deposition, as well as on bare, flat substrates inclined at an angle to the sputter source. Both of these geometries were intended to examine the effect of oblique incidence deposition on the anisotropy of reactively sputtered FeAlN films. Films on topographic substrates showed anisotropy fields of up to 75 Oe, while films on bare tilted substrates showed anisotropy fields up to 100 Oe, presenting the possibility of low permeability in the sloping regions of thin film recording heads which utilize these materials for inductive head poles
Keywords :
aluminium compounds; iron compounds; magnetic anisotropy; magnetic permeability; magnetic thin films; soft magnetic materials; sputtered coatings; surface topography; FeAlN; FeAlN films; anisotropy; hardcured photoresist; inductive head poles; oblique incidence deposition; patterned lines; permeability; reactive sputtering; soft magnetic properties; surface topography; thin film recording heads; tilted substrates; topographic substrates; Anisotropic magnetoresistance; Geometry; Magnetic films; Magnetic heads; Magnetic properties; Permeability; Resists; Sputtering; Substrates; Surface topography;
Journal_Title :
Magnetics, IEEE Transactions on
