The effect of substrate temperature on the magnetic properties of FeAlN thin films for recording heads

Author

Bain, James A. ; Kryder, Mark H.

Author_Institution

Carnegie Mellon Univ., Pittsburgh, PA, USA

Volume

31

Issue

6

fYear

1995

fDate

11/1/1995 12:00:00 AM

Firstpage

2703

Lastpage

2705

Abstract

The soft magnetic properties of FeAlN films have been shown to be strongly dependent on the temperature of the substrate during deposition. Films of FeAlN were sputtered deposited onto Alumina/Titanium Carbide (ALTIC) ceramic substrates at substrate temperatures between 20 and 200°C. In the range of 150 to 200°C, the films display a well oriented easy axis with coercivities less than 1.5 Oe, and a hard axis coercivity of less than 1 Oe. Deposition at temperatures below 150°C resulted in high coercivities and no in-plane anisotropy. This behavior is explained in terms of the temperature dependence of the formation of the γ´-Fe₄N phase (identified by x-ray diffraction), which is necessary for the soft magnetic properties. A discussion of heating transients due to substrate thermal mass is also included

Keywords

aluminium compounds; coercive force; iron compounds; magnetic anisotropy; magnetic heads; magnetic thin films; soft magnetic materials; sputtered coatings; γ´-Fe₄N phase; 20 to 200 C; ALTIC ceramic substrates; FeAlN; FeAlN thin films; X-ray diffraction; coercivities; heating transients; recording heads; soft magnetic properties; sputter deposition; substrate temperature; substrate thermal mass; Anisotropic magnetoresistance; Ceramics; Coercive force; Displays; Magnetic films; Magnetic properties; Temperature dependence; Temperature distribution; Titanium; X-ray diffraction;

fLanguage

English

Journal_Title

Magnetics, IEEE Transactions on

Publisher

ieee

ISSN

0018-9464

Type

jour

DOI

10.1109/20.490098

Filename

490098