Title :
Effects of Al micro-bumps on the magnetic properties and morphology of CoCrTa/Cr/Al thin films
Author :
Chang, H.S. ; Shin, K.H. ; Lee, T.D. ; Park, J.K.
Author_Institution :
Dept. of Mater. Sci. & Eng., Korea Inst. of Sci. & Technol., Seoul, South Korea
fDate :
11/1/1995 12:00:00 AM
Abstract :
CoCrTa thin films were deposited on glass substrates at various temperatures with or without Al micro-bumps. The coercivity of the CoCrTa thin films increased considerably by introducing the Al micro-bumps as a texture layer. The cause of the coercivity increase was attributed to the development of strong Co(101¯0) texture and refinement of Co grains induced by small Cr grains when the films were deposited on the Al bumped substrates. The morphology of the CoCrTa/Cr/Al thin films was very sensitive to the Al micro-bump distributions
Keywords :
aluminium; chromium; chromium alloys; cobalt alloys; coercive force; magnetic thin films; tantalum alloys; Al micro-bumps; CoCrTa-Cr-Al; CoCrTa/Cr/Al thin films; coercivity; glass substrates; grain refinement; magnetic properties; morphology; texture; Artificial intelligence; Chromium; Coercive force; Ferrite films; Glass; Magnetic films; Magnetic properties; Morphology; Substrates; Transistors;
Journal_Title :
Magnetics, IEEE Transactions on
