Title :
Al2O3-doped Sr-ferrite magnetic thin films with an easy-axis in-plane orientation
Author :
Chang, W.C. ; Lee, B.J. ; Lin, J.C. ; Chen, C.J.
Author_Institution :
Nat. Chung Cheng Univ., Ming-Hsing, Taiwan
fDate :
11/1/1995 12:00:00 AM
Abstract :
This paper reports the process parameters for growing Al2 O3-doped Sr-ferrite magnetic thin films with an easy-axis in-plane orientation for the purpose of high density magnetic recording. It was found that for films thicker than 1200 Å, the magnetic properties of these Sr-ferrite thin films, viz. Hc=3.6 kOe, S=0.61 and SFD=0.38, could be easily achieved with conventional sputtering by controlling film thickness, annealing temperature, excess SrO and the amount of Al2O3 doping in the target
Keywords :
X-ray diffraction; annealing; coercive force; crystal orientation; ferrites; magnetic recording; magnetic thin films; sputter deposition; strontium compounds; Al2O3 doping; Al2O3-doped Sr-ferrite magnetic thin films; RF sputtering; SrFe12O19:Al2O3; X-ray diffraction; annealing temperature; easy-axis in-plane orientation; excess SrO control; film thickness control; high density magnetic recording; magnetic properties; Annealing; Atomic force microscopy; Coercive force; Crystallization; Furnaces; Magnetic films; Magnetic hysteresis; Magnetic properties; Morphology; X-ray diffraction;
Journal_Title :
Magnetics, IEEE Transactions on
