Title :
Study and preparation of high-Tc superconducting (HTSC) thin films for electronic applications
Author :
Chan, Siu-Wai ; Krchnavek, Robert R. ; Rogers, C.T. ; Allen, S.J. ; Biazzo, M. ; Chase, Eugene W. ; Cheeks, T.L. ; DeRosa, F. ; Hwang, Dah-Min David ; Miceli, P.F. ; Sampere, S.M. ; Wilkens, B.J.
Author_Institution :
Bellcore, Red Bank, NJ, USA
fDate :
12/1/1989 12:00:00 AM
Abstract :
The authors review the preparation, processing, and properties of the coevaporated Y-Ba-Cu-O thin films. In addition, they cover the fabrication of submicrometer wires and laser micromodification of these films. High-quality superconducting YBa2Cu3O7-x thin films were reproducibly prepared through thermal coevaporation of BaF2, Y, and Cu. Uniformity in thickness and composition of the deposited films can be achieved for a 2.5-in.-diameter area. Highly c-oriented films with a total transition temperature above 90 K were reproducibly made on (001)SrTiO3 with a critical current above 105 A/cm2 at 77 K. The total transition temperatures (Tc at R=0) of YBa2Cu3O7-x films on ZrO2, (001)YAG, (001)MgO, and (001)MgAl2O4 are 87, 74, 63, and 57 K, respectively. The effect of the postdeposition processing ambient on the preparation of YBa2Cu3O7-x thin films from a BaF2 source was studied. YBa2 Cu3O7-x wires from several micrometers to submicrometer in size were produced by photolithography processes and argon ion milling. The resulting wires behaved as scaled down bulk superconducting films. Both pure YBa2Cu3O7-x films and a mixture of YBa2Cu3O7-x and Y2Ba4Cu8Ox films were laser-modified
Keywords :
barium compounds; critical current density (superconductivity); high-temperature superconductors; laser beam applications; photolithography; sputter etching; substrates; superconducting thin films; superconducting transition temperature; yttrium compounds; (001) surface; 2.5 in; 57 to 90 K; MgAl2O4; MgO; SrTiO3; YAG; YAl5O12; YBa2Cu3O7-x thin films; YBa2Cu3O7-x-Y2Ba 4Cu8Ox; ZrO2; coevaporated Y-Ba-Cu-O thin films; critical current; fabrication; ion milling; laser micromodification; photolithography; postdeposition processing ambient; preparation; processing; properties; submicrometer wires; thermal coevaporation; transition temperature; Critical current; Lithography; Optical device fabrication; Sputtering; Superconducting filaments and wires; Superconducting films; Superconducting thin films; Superconducting transition temperature; Transistors; Yttrium barium copper oxide;
Journal_Title :
Components, Hybrids, and Manufacturing Technology, IEEE Transactions on
