Enhancing CoCr(Pt)Ta target´s pass-through flux for magnetron sputtering

Author

Schlott, M. ; Weigert, M. ; Gehman, B.L.

Author_Institution

Degussa AG, Hanau, Germany

Volume

31

Issue

6

fYear

1995

fDate

11/1/1995 12:00:00 AM

Firstpage

2818

Lastpage

2820

Abstract

The transmitted DC magnetic field for CoCr(Pt)Ta sputtering targets, containing 2-6 at.% Ta and 0 11 at.% Pt, on magnetron cathodes is investigated. If the Ta content exceeds the solubility limit of 1.5-2 at.%, heat treatment just below the peritectic temperature for Co₇Ta₂ formation results in the transformation of λ ₃/Co₂Ta precipitates or dissolved Ta into Co₇Ta₂ phase. Finely dispersed Co₇Ta₂ precipitates are formed which seem to exert enough lattice strain to support the martensitic transformation of high-temperature fcc into room temperature hcp Co-Cr solid solution. Since the space-averaged hcp Co-Cr crystal has a lower permeability than the fcc crystal, such target material shows at least a 60% increase in its transmitted magnetic field on magnetron cathodes

Keywords

chromium alloys; cobalt alloys; ferromagnetic materials; heat treatment; magnetic thin films; martensitic transformations; platinum alloys; precipitation; solid solutions; sputter deposition; tantalum alloys; CoCrPtTa; CoCrTa; DC magnetic field; heat treatment; high-temperature FCC crystal; lattice strain; magnetron cathodes; magnetron sputtering; martensitic transformation; pass-through flux; peritectic temperature; permeability; precipitates; room temperature HCP crystal; solid solution; solubility; sputtering targets; Cathodes; Heat treatment; Lattices; Magnetic field induced strain; Magnetic fields; Magnetic flux; Magnetic materials; Solids; Sputtering; Temperature;

fLanguage

English

Journal_Title

Magnetics, IEEE Transactions on

Publisher

ieee

ISSN

0018-9464

Type

jour

DOI

10.1109/20.490162

Filename

490162