A critical evaluation of RGA testing

Author

David, R.F.S. ; Shores, A. Andrew ; Friedlander, M.

Author_Institution

Teledyne Microelectron., Los Angeles, CA, USA

Volume

12

Issue

4

fYear

1989

fDate

12/1/1989 12:00:00 AM

Firstpage

578

Lastpage

586

Abstract

Silanized glass ampoules containing 12 accurately known gas mixtures were carefully prepared by a laboratory. Ampoules were sent as blind samples to four laboratories for residual gas analysis (RGA) using mass spectrometry. Results showed gross inaccuracies and inconsistencies, particularly for water vapor. Even relative measurements of water vapor level (i.e. ordering of samples from dry to wet) were inaccurate. There was great inconsistency in results between the analyses of the same atmosphere by different laboratories. The deletion of this test from MIL-STD-883 until an accurate, repeatable test method is established is recommended

Keywords

chemical analysis; hybrid integrated circuits; materials testing; military equipment; quality control; reliability; standards; MIL-STD-883; RGA testing; blind samples; critical evaluation; gross inaccuracies; inconsistencies; mass spectrometry; relative measurements; residual gas analysis; water vapor; Argon; Chemical elements; Gases; Glass; Helium; Hybrid integrated circuits; Laboratories; Manufacturing processes; Mass spectroscopy; Testing;

fLanguage

English

Journal_Title

Components, Hybrids, and Manufacturing Technology, IEEE Transactions on

Publisher

ieee

ISSN

0148-6411

Type

jour

DOI

10.1109/33.49019

Filename

49019