Title :
A critical evaluation of RGA testing
Author :
David, R.F.S. ; Shores, A. Andrew ; Friedlander, M.
Author_Institution :
Teledyne Microelectron., Los Angeles, CA, USA
fDate :
12/1/1989 12:00:00 AM
Abstract :
Silanized glass ampoules containing 12 accurately known gas mixtures were carefully prepared by a laboratory. Ampoules were sent as blind samples to four laboratories for residual gas analysis (RGA) using mass spectrometry. Results showed gross inaccuracies and inconsistencies, particularly for water vapor. Even relative measurements of water vapor level (i.e. ordering of samples from dry to wet) were inaccurate. There was great inconsistency in results between the analyses of the same atmosphere by different laboratories. The deletion of this test from MIL-STD-883 until an accurate, repeatable test method is established is recommended
Keywords :
chemical analysis; hybrid integrated circuits; materials testing; military equipment; quality control; reliability; standards; MIL-STD-883; RGA testing; blind samples; critical evaluation; gross inaccuracies; inconsistencies; mass spectrometry; relative measurements; residual gas analysis; water vapor; Argon; Chemical elements; Gases; Glass; Helium; Hybrid integrated circuits; Laboratories; Manufacturing processes; Mass spectroscopy; Testing;
Journal_Title :
Components, Hybrids, and Manufacturing Technology, IEEE Transactions on