• DocumentCode
    793301
  • Title

    Intermodulation in capacitively coupled microelectromechanical filters

  • Author

    Alastalo, Ari T ; Kaajakari, Ville

  • Author_Institution
    VTT Tech. Res. Center of Finland, Espoo, Finland
  • Volume
    26
  • Issue
    5
  • fYear
    2005
  • fDate
    5/1/2005 12:00:00 AM
  • Firstpage
    289
  • Lastpage
    291
  • Abstract
    A compact model for third-order intermodulation in capacitively coupled microelectromechanical filters is derived. A simple expression for the input third-order intercept point is given. This is valuable in designing micromechanical filters, for example, for communication applications. The validity of the analytic model is verified with numerical harmonic-balance simulations and experimental measurements.
  • Keywords
    filters; intermodulation distortion; micromechanical devices; communication systems; filter distortion; intermodulation distortion; microelectromechanical devices; microelectromechanical filters; third-order intermodulation; Filtering; Frequency; Intermodulation distortion; Microcavities; Micromechanical devices; Passband; Resonator filters; Springs; Transducers; Voltage; Communication systems; filter distortion; filters; intermodulation distortion; microelectromechanical devices;
  • fLanguage
    English
  • Journal_Title
    Electron Device Letters, IEEE
  • Publisher
    ieee
  • ISSN
    0741-3106
  • Type

    jour

  • DOI
    10.1109/LED.2005.846589
  • Filename
    1425685