Title :
Intermodulation in capacitively coupled microelectromechanical filters
Author :
Alastalo, Ari T ; Kaajakari, Ville
Author_Institution :
VTT Tech. Res. Center of Finland, Espoo, Finland
fDate :
5/1/2005 12:00:00 AM
Abstract :
A compact model for third-order intermodulation in capacitively coupled microelectromechanical filters is derived. A simple expression for the input third-order intercept point is given. This is valuable in designing micromechanical filters, for example, for communication applications. The validity of the analytic model is verified with numerical harmonic-balance simulations and experimental measurements.
Keywords :
filters; intermodulation distortion; micromechanical devices; communication systems; filter distortion; intermodulation distortion; microelectromechanical devices; microelectromechanical filters; third-order intermodulation; Filtering; Frequency; Intermodulation distortion; Microcavities; Micromechanical devices; Passband; Resonator filters; Springs; Transducers; Voltage; Communication systems; filter distortion; filters; intermodulation distortion; microelectromechanical devices;
Journal_Title :
Electron Device Letters, IEEE
DOI :
10.1109/LED.2005.846589
