Title :
Influence of tester, test method, and device type on CDM ESD testing
Author :
Verhaege, Koen ; Groeseneken, Guido V. ; Maes, Herman E. ; Egger, Peter ; Gieser, Horst
Author_Institution :
IMEC, Leuven, Belgium
fDate :
6/1/1995 12:00:00 AM
Abstract :
In this paper, the charged device model (CDM) electrostatic discharge (ESD) events emulated by different commercial concerns are studied. First, the characteristic waveforms, defined by the EOS/ESD CDM ESD draft standard (DS5.3-1993), are compared and some major problems related to the specification of socketed CDM testers are discussed. Second, the results of an extensive CDM ESD test program are reported. The influences of various test parameters, such as the charging method (direct or field), the discharge mode (contact or noncontact), the charge pin (substrate pin or pin to be discharged) and the device package are studied. Finally, correlations of CDM ESD test results (the voltage thresholds and electrical failure signatures) are investigated
Keywords :
electrostatic discharge; failure analysis; integrated circuit reliability; integrated circuit testing; production testing; CDM ESD testing; IC testing; characteristic waveforms; charge pin; charged device model; charging method; device package; device type; discharge mode; electrical failure signatures; electrostatic discharge; socketed CDM testers; test method; voltage thresholds; Circuit testing; Electrostatic discharge; Integrated circuit testing; Packaging; Probes; Robots; Senior members; Sockets; Stress; System testing;
Journal_Title :
Components, Packaging, and Manufacturing Technology, Part A, IEEE Transactions on
